Chair : B. COURTOIS, TIMA Laboratory, France
Co-Chair : K. MARKUS, MCNC, USA

Programme

CAD, Design and Test

Chair: S. CRARY, The University of Michigan, USA
and Danish Tech. University, Denmark

Co-Chair: J.M. KARAM, MEMSCAP, France

Micromachining and Microfabrication

Chair: W. EHRFELD, IMM, Germany

Co-Chair: H. FUJITA, The University of Tokyo, Japan

including

Workshop on MEMS/MOEMS
business development


Sponsors

in cooperation with

IEEE Computer Society Test Technology Technical Committee


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Tous droits réservés.